Parts For Sale LAM 853-030675-001 LAM 853-030675-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-030675-001 Manufacturer LAM Part Number 853-030675-001 Description VI PROBE ASSY, MKS PN:000-1106-100 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 716-030135-001 Focus ring, 8" ESC 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 734-093790-001 ORING, 8.484 ID X 0.139 715-011532-001 Lam 4420 Upper Electrode Plate Seal 715-011532-001 Rev.D 723-001205-006 SPACER RND .14 X .25 X .38 715-027741-023 Lam Research EPD Port 715-027741-023 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 716-443129-001 RING, FOCUS, ESC, INNER, 8 INCH 796-028633-010 Screw AL Plate Baffle 724-077075-002 VACUUM ROBOT PICK