Parts For Sale LAM 853-021876-002 LAM 853-021876-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021876-002 Manufacturer LAM Part Number 853-021876-002 Description 4520I CHAMBER, UPPER, ISOTROPIC BELL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 839-270652-001 LAM RESEARCH 839-270652-001 718-094523-281 ASSY,ELCTD,ESC 8" NOTCHED LT 571-045788-002 LAM RESEARCH 571-045788-002 CDSO IGS GAS BOX 150 PSIG 715-028627-002 Baffle, lower 839-101870-002 716-331142-001 Ring, edge, top, wide 734-093789-001 Seal O-Ring Gate Chamber 853-089988-115 LAM CABLE ASSY P/N 853-089988-115 , 684-121203-002, 684 ... 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 715-443139-001 719-159808-801 LAM RESEARCH 719-159808-801 RING 02-293756-00