Parts For Sale LAM 853-021664-001 LAM 853-021664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021664-001 Manufacturer LAM Part Number 853-021664-001 Description ASSY HEATER BELLOWS Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 839-020965-005 Assembly, Outer, .18 Step, 300M 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 716-347266-002 715-330092-002 COVER,NUT,BOT GAS FD W/O #715-330092-002 A4T2 TCP-9400 724-077075-002 VACUUM ROBOT PICK 739-009418-001 739-009418-001 SEAL LID ROTARY 716-011603-001 PLATE, SEAL