Parts For Sale LAM 853-021664-001 LAM 853-021664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021664-001 Manufacturer LAM Part Number 853-021664-001 Description ASSY HEATER BELLOWS Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 716-007136-011 Ring Quartz Upper HPT 716-008645-005 Cover Ring Quartz HP 713-057586-001 PLUG,RTD,THRM CTRL PL 715-008067-001 Gate, Hard Anodized LAM P/N 715-008067-001 853-370186-001 CABLE OVERTEMP 716-020905-001 RING, FILLER, LOWER WAFER CLAMP 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 810-017008-001 PCB, Temperature Assembly---Not in original Packaging 724-077075-002 VACUUM ROBOT PICK
