Parts For Sale LAM 853-021664-001 LAM 853-021664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021664-001 Manufacturer LAM Part Number 853-021664-001 Description ASSY HEATER BELLOWS Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 734-005271-001 O-RING VITON 10.55X2.62; 7/16 ID X 0.103 716-330045-281 R, edge, non landed, 8' not, 96DTX 723-001205-006 SPACER RND .14 X .25 X .38 715-330984-001 GASINJECTIONRING(R) Application: ALLIANCE9400PTX 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 716-031453-001 RING, FILLER, LOWER CHAMBER 720-098691-002 724-077075-002 VACUUM ROBOT PICK 839-011906-912 Electrode Silicon Polish