Parts For Sale LAM 853-021664-001 LAM 853-021664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021664-001 Manufacturer LAM Part Number 853-021664-001 Description ASSY HEATER BELLOWS Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON 713-057586-001 PLUG,RTD,THRM CTRL PL 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 810-017003-005 DIP/HIGH FREQUENCY PCB MATCH BOX CONTROL 713-011666-006 RING,FOCUS/SLEEVE COMBO 810-17013-001 LAM Research 810-17013-001 Gap Drive Amplifier 4420 Inte ... 716-330504-081 Ring ,focus ,8' ,flatted GDR ESC ,ceramic 724-077075-002 VACUUM ROBOT PICK 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 734-092561-260 .139 c/s