Parts For Sale LAM 853-021664-001 LAM 853-021664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021664-001 Manufacturer LAM Part Number 853-021664-001 Description ASSY HEATER BELLOWS Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 660-007612-001 SWITCHING POWER SUPPLY PIONNEER MAGNETIC PM2500A-1 INSTA ... 716-140236-002 R, CONFINEMENT, MOD, QTZ DEGREASE 713-057586-001 PLUG,RTD,THRM CTRL PL 715-010213-001 Foot (Tool Calibration Edge Sensor) 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 PCB 000-061 REV M 713-020911-102 Plunger Cap Lower Housing LAM 4520 722-000958-001 NUT, HEX, 10-32 (PACK OF 10) 713-011579-001 Stem Plunger Spring Guide 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ...