Parts For Sale LAM 853-021637-065 LAM 853-021637-065 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021637-065 Manufacturer LAM Part Number 853-021637-065 Description ASSY,CA.,SIGNAL CONT/MATCH 65' Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 839-800327-432 LAM 839-800327-432 ESC Chuck 723-001205-006 SPACER RND .14 X .25 X .38 832-034908-009 FRU,ASSY.ENCL.TCP MTCH,KIYO 23 839-330743-002 LAM BSR Bellows 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 810-17004-001 LAM Research 810-17004-001 Rev. F Solenoid Interlock Boa ... 716-331157-014 Top disk quartz 724-077075-002 VACUUM ROBOT PICK 839-470315-001 Cap Gas