Parts For Sale LAM 853-021637-065 LAM 853-021637-065 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021637-065 Manufacturer LAM Part Number 853-021637-065 Description ASSY,CA.,SIGNAL CONT/MATCH 65' Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 720-016278-114 1/4-20 x 5/8" Slotted Pan Head Screw 715-028486-002 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 605-012620-001 PCB,INDEX,DUAL SNSR,ASYSI 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 796-901038-002 DOOR,VAT,ENHANCED,LOADLOCK,230 715-003851-002 724-077075-002 VACUUM ROBOT PICK 853-012350-002 LAM Research 853-012350-002 Etcher Outer Gate Assembly L ...