Parts For Sale LAM 853-021635-013 LAM 853-021635-013 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021635-013 Manufacturer LAM Part Number 853-021635-013 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 SG Other LAM Parts 715-011673-005 CAP, LOWER ELECTRODE 5 INCH 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 853-032776-001 ASSEMBLY PADDLE LIFTER 853-015130-002 MINI-MATCH,,LAM 9600 716-140163-261 Ring Hot Edge 15 DEG ESC STD 6" 723-001205-006 SPACER RND .14 X .25 X .38 768-090229-001 SWITCH, PRESSURE, ULTRA LOW DI PCB 000-061 REV M 131052003 SHIM, MYLAR, 0.010 716-028627-104 BAFFLE,SIC,6" XL,LRC,716-028627-104 714-045743-809 Outer Liner 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136