Parts For Sale LAM 853-021630-002 LAM 853-021630-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021630-002 Manufacturer LAM Part Number 853-021630-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 839-270652-001 LAM RESEARCH 839-270652-001 853-370186-001 CABLE OVERTEMP 718-094756-081 ELCTD,CAP,GD RING,ESC,8IN NCH 716-011570-001 Filler Orifice w/c Ceramic 839-101870-002 718-043893-801 ELECTRODE, ESC 9400 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 734-092041-001 O-Ring Flouro Silicon Spacer Quartz 716-330504-081 Ring ,focus ,8' ,flatted GDR ESC ,ceramic 719-159808-801 LAM RESEARCH 719-159808-801 RING 716-011533-001 Window Quartz Gap Insulator