Parts For Sale LAM 853-021630-002 LAM 853-021630-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021630-002 Manufacturer LAM Part Number 853-021630-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 716-021323-001 Funnel Quartz Power Supply Module 797-008571-103 MASS FLOW CONTROLLER UNIT UPC-1300 DELIVERED WITH CALIBR ... 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 713-540236-002 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 839-101870-002 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 853-012100-003 Kit Sub-Assy PM Housing Arm 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 716-031453-002 RING FILLER LOWER CHAMBER 715-130092-006 Arm 6" Wafer Holder Rev.1