Parts For Sale LAM 853-021630-002 LAM 853-021630-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021630-002 Manufacturer LAM Part Number 853-021630-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 715-495014-001 LINER CHAMBER TRNSN 839-800327-315 Etch FLEX Talon Ect. LAM 2300 ESC 300mm 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM 839-101870-002 716-140139-001 LAM RESEARCH 716-140139-001 RING HOT EDGE HI WALL ESC 8" ... 720-098691-002 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-015130R204-E-ELM