Parts For Sale LAM 853-021614-001 LAM 853-021614-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-021614-001 Manufacturer LAM Part Number 853-021614-001 Description ASSY, CABLE, HEATER AC PWR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 853-011451-001 715-006310-001 SPACER 4-PIN LIFTER 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 PCB 000-061 REV M 853-017350-002 GAP DRIVE CONTROL ENCLOSURE L/M ASSY 790-008882-195 Belt Drive Harmonic XLL Small 716-330504-081 Ring ,focus ,8' ,flatted GDR ESC ,ceramic 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-064887-402 SIGNAL CONDITIONER CONTROL BOX