Parts For Sale LAM 853-017163R001 LAM 853-017163R001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-017163R001 Manufacturer LAM Part Number 853-017163R001 Description RFRB ASSY RF SWITCH BOX Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 720-009531-101 Slotted Flat Head, KEL-F 718-094523-281 ASSY,ELCTD,ESC 8" NOTCHED LT 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 718-043893-801 ELECTRODE, ESC 9400 734-092040-001 O-Ring Flouro Silicon Door Inner DSQ 853-027430-001 Sensor 724-077075-002 VACUUM ROBOT PICK 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136