Parts For Sale LAM 853-017163R001 LAM 853-017163R001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-017163R001 Manufacturer LAM Part Number 853-017163R001 Description RFRB ASSY RF SWITCH BOX Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts FPS1000-24 FPS1000-24 713-057586-001 PLUG,RTD,THRM CTRL PL 716-140163-001 (modified) Modified Hot Edge Ring 713-028553-103 RING, CONFINEMENT, VESPEL 853-031764-004 7890 LAM RESEARCH LOWER ELECTRODE, ESC, FIXED GAP (PARTS ... 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 715-003851-002 724-077075-002 VACUUM ROBOT PICK 716-443234-002 Etch Kit Components in Process Kit ComponentsRING, FOCUS ... 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
