Parts For Sale LAM 853-015820-001 LAM 853-015820-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015820-001 Manufacturer LAM Part Number 853-015820-001 Description ASSY,HARN,HEATER OVERTEMP CIRC Status Available Approx. Qty 67 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 67.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 716-331157-004 High Purity Quartz Disk for 9400DFM 853-031764-004 7890 LAM RESEARCH LOWER ELECTRODE, ESC, FIXED GAP (PARTS ... 723-001205-006 SPACER RND .14 X .25 X .38 715-011986-138 CAP, LWR ELCTD, 8"MIL GRV, NO-POL 713-330704-001 HSG SPR 716-011963-003 PLATE, W/C ATTACHMENT 716-011923-001 PLATE W/C ATTACHMENT DOUBLE PACKAGE 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136