Parts For Sale LAM 853-015516-004 LAM 853-015516-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015516-004 Manufacturer LAM Part Number 853-015516-004 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Used 1.0 – Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 715-012567-001 SPATULA SHUTTLE 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 734-007524-208 O-RING,CHEMRAZ,SSE38,0.609 ID X .139C/S 131052003 SHIM, MYLAR, 0.010 716-003473-802 Nozzle, Gas Injector KIYO 739-900064-002 QUAD SEAL .070 ID PERIMETER 716-160255-002 Chamber Plasma Quartz 716-330045-004 Ring edge, ,8' notched, shadow ring, ,ESC 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136