Parts For Sale LAM 853-01530-103 LAM 853-01530-103 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-01530-103 Manufacturer LAM Part Number 853-01530-103 Description Lam Mini Match Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Refurbished 1.0 GB Other LAM Parts 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON 716-008645-005 Cover Ring Quartz HP 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-017305-001 Hybricon 044-613 c/w 710-17001-1 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 716-016830-002 Ring WrapTwist Top Stepped DFC200mm 716-460472-002 Cover VIA Ceramic ESC(T8) 724-077075-002 VACUUM ROBOT PICK 718-094523-261 ASSY, ELCTD,ESC 6" MJR FLT LT 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136