Parts For Sale LAM 853-01530-103 LAM 853-01530-103 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-01530-103 Manufacturer LAM Part Number 853-01530-103 Description Lam Mini Match Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Refurbished 1.0 GB Other LAM Parts 715-013639-009 LAM RESEARCH (LAM) 715-013639-009 Chamber Ring LAM RE ... 713-028485-001 bolt electrode ring clamp KELF For: LAM 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 746-000219-001 BEARING, GATE LINKAGE BALL (PACK OF 10) 716-140069-002 Clamp Attachment Plate,ESC,150mm 853-015130-002 MINI-MATCH,,LAM 9600 660-032596-023 APEX-1513, RF, AE, 3156110-008 , Tool: 2300 KIYO45 716-028454-012 Window Quartz TCP Top LAM 9400 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136