Parts For Sale LAM 853-015130R204-E-ELM LAM 853-015130R204-E-ELM Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015130R204-E-ELM Manufacturer LAM Part Number 853-015130R204-E-ELM Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 716-008645-005 Cover Ring Quartz HP 716-021323-002 Quartz Funnel DSQ Chamber 739-090783-001 STRAP CONTACT RF COPPER 839-020965-007 ELECTRODE 734-008971-001 O-RING VITON 145.64X3.53 715-027741-023 Lam Research EPD Port 715-027741-023 810-800082-029 REV. B 853-015130-002-M-3609 853-015130R204-C-ELM 853-031685-002-2-C201 101VMEJ106-9001 REV. B 810-800081-013 REV. A