Parts For Sale LAM 853-015130R204-E-ELM LAM 853-015130R204-E-ELM Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015130R204-E-ELM Manufacturer LAM Part Number 853-015130R204-E-ELM Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 716-021323-001 Funnel Quartz Power Supply Module 853-330722-001 ASSY, ROD, CLPG, BAC, JD PEAK870VL2 REV. D 839-101870-002 12-8882-068-002 716-021886-002 O-RING, BELL JAR PFE 716-160170-001 WINDOW,QTZ DSQ HNG 853-002751-002-M 713-443118-003 716-031257-531 Ring Edge Top Quartz EBP 300mm 853-031685-002-2-C201 714-045743-809 Outer Liner