Parts For Sale LAM 853-015130R204-E-ELM LAM 853-015130R204-E-ELM Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015130R204-E-ELM Manufacturer LAM Part Number 853-015130R204-E-ELM Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 853-012530-001 ASSY, VAC, BLK, FRU 810-495586-001 Lam Research 810-495586-001 Interlock Board 853-330722-001 ASSY, ROD, CLPG, BAC, JD PEAK870VL2 REV. D 839-101870-002 853-012200-002 Inner Gate Assembly (Fully with order) includes: air ... 12-8882-068-002 768-095214-002 Vacuum switch 400 torr, 10 RA, 3" 853-002751-002-M 739-900064-002 QUAD SEAL .070 ID PERIMETER 853-031685-002-2-C201 810-017034-005 PCB, CPU