Parts For Sale LAM 853-015130R204-C-ELM LAM 853-015130R204-C-ELM Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015130R204-C-ELM Manufacturer LAM Part Number 853-015130R204-C-ELM Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 853-032190-008 LRC Match 734-006760-001 O-RING; 7.484 ID X 0.139 CX 853-330722-001 ASSY, ROD, CLPG, BAC, JD 17688-01 Gas Distribution Plate 200mm PEAK870VL2 REV. D 839-101870-002 12-8882-068-002 796-028633-010 Screw AL Plate Baffle 839-443215-101 Etch Kit Components in Process Kit ComponentsELECTRODE, ... 853-002751-002-M 853-017631-002 ASSY, VAC SW WASCO 853-017631-002 853-031685-002-2-C201