Parts For Sale LAM 853-015130-003 LAM 853-015130-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015130-003 Manufacturer LAM Part Number 853-015130-003 Description RF MATCH GEAR DRIVEN Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 734-006338-001 Seal Quad Q4010 716-006711-001 showerhead, graphite oxide For: LAM 853-015130-002 MINI-MATCH,,LAM 9600 810-330490-001 FILTER B/D 723-001205-006 SPACER RND .14 X .25 X .38 775-091420-001 RESIN CARTRIDGE 839-019090-324 chuck 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
