Parts For Sale LAM 853-015130-003 LAM 853-015130-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015130-003 Manufacturer LAM Part Number 853-015130-003 Description RF MATCH GEAR DRIVEN Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 853-015130-002 MINI-MATCH,,LAM 9600 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 853-017634-101 ASSY SOLENOID RELEASE 720-092758-010 Screw 716-140139-001 LAM RESEARCH 716-140139-001 RING HOT EDGE HI WALL ESC 8" ... 724-077075-002 VACUUM ROBOT PICK 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 723-001205-006 SPACER RND .14 X .25 X .38 839-011907-222 ELCTD,SI,8IN,LR,SM HOLE,LCR 713-002617-003 LAM Research 713-002617-003 Quartz Plate WDO Polycarb CH ... 131052003 SHIM, MYLAR, 0.010