Parts For Sale LAM 853-015130-003 LAM 853-015130-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015130-003 Manufacturer LAM Part Number 853-015130-003 Description RF MATCH GEAR DRIVEN Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 17621-01 Plate Gas Dist 6" 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 716-331088-001 Quartz Top Edge Ring, 8" ESC 839-020965-007 ELECTRODE 716-800842-008 NSR,FOC R,SHLD 200MM 715-009306-006 Ring Focus Aluminum 6" 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 810-017033-003 ASSY, PCB, SRAM 512K 853-012230-002 GATE, INNER, DOOR