Parts For Sale LAM 853-013542-002-1 LAM 853-013542-002-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-013542-002-1 Manufacturer LAM Part Number 853-013542-002-1 Description PUMP 44XX Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 IE Other LAM Parts 715-030860-001 LINER/SPACER, EXT GND RING, 2.0OCM 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 810-495659-304 Lam Research 810-495659-304 Rev. B, Bicep ESC Power Supp ... 715-027638-814 GDP 716-011764-281 Plate Wafer Clamp 8" Dome No Flat 796-028633-010 Screw AL Plate Baffle 715-028627-001 PLATE LOWER BAFFLE 6' 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136