Parts For Sale LAM 853-012160-002 LAM 853-012160-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-012160-002 Manufacturer LAM Part Number 853-012160-002 Description CAP Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 734-007355-001 O-ring,7 1/4ID*3/32cs,VTN 715-012567-001 SPATULA SHUTTLE 723-001205-006 SPACER RND .14 X .25 X .38 716-140139-001 LAM RESEARCH 716-140139-001 RING HOT EDGE HI WALL ESC 8" ... 853-012100-003 Kit Sub-Assy PM Housing Arm 716-330504-081 Ring ,focus ,8' ,flatted GDR ESC ,ceramic 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 20-135632-00 CU,AIR CYL,DBL-ACTG 4"STROKE,3/4"