Parts For Sale LAM 853-012160-002 LAM 853-012160-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-012160-002 Manufacturer LAM Part Number 853-012160-002 Description CAP Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 715-330135-001 BSR GAS INJECTION RING INSTALLATION POSSIBLE ON: LAM TCP ... 853-017480-001 Lam Research OnTrak 853-017480-001 - Assy Vacuum Switch ... 857-072806-005 Etch FLEX Talon Ect. LAM 2300 Talon Gaskets 300mm 723-001205-006 SPACER RND .14 X .25 X .38 839-003958-001 Diffuser LL 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 724-077075-002 VACUUM ROBOT PICK 716-330504-081 (modified) Modified 8" Focus Ring 131052003 SHIM, MYLAR, 0.010 734-000663-001 O-ring inner door bellows 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136