Parts For Sale LAM 853-012160-002 LAM 853-012160-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-012160-002 Manufacturer LAM Part Number 853-012160-002 Description CAP Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-443189-002 Etch Kit Components in Process Kit ComponentsCOVER, QUAR ... 723-001205-006 SPACER RND .14 X .25 X .38 734-007460-001 O-RING VITON BK 177,47X2,62; 6.987 ID X 0.103 C/S 839-101870-002 734-007524-294 O-Ring Chemraz SSE38 21.17 ID x .142C/S 853-011053-002 ASSY,HEATED,MANO 724-077075-002 VACUUM ROBOT PICK 768-090914-001 SWITCH, VACUUM 734-091993-001 O-Ring Flouro Silicon Window Quartz 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136