Parts For Sale LAM 853-004118-002 LAM 853-004118-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-004118-002 Manufacturer LAM Part Number 853-004118-002 Description ASSY, RF INTERFACE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 720-092758-010 Screw 724-077075-002 VACUUM ROBOT PICK 720-016278-114 1/4-20 x 5/8" Slotted Pan Head Screw 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 716-020904-016 RING, EDGE FOCUS LOWER WAFER CLAMP 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 723-001205-006 SPACER RND .14 X .25 X .38 131052003 SHIM, MYLAR, 0.010 840-009865-040 VACUUM, VALVE, REPAIR KIT (HPS) Double Baged 853-015130-002 MINI-MATCH,,LAM 9600 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 715-330825-007 ALUMINUM CHAMBER LINER