Parts For Sale LAM 853-002103-001 LAM 853-002103-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-002103-001 Manufacturer LAM Part Number 853-002103-001 Description CCL4 Cannister kit, LAM P/N 853-002103-001 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 CN Other LAM Parts 715-018991-208 ELECTRODE, ALUMINUM ANODIZE 716-330167-281 Bottom Actuated Clamp Ring 8" 713-057586-001 PLUG,RTD,THRM CTRL PL 723-001205-006 SPACER RND .14 X .25 X .38 921-008908-001 INSERT, 5/8 TUBE ODX, 1/2 TUBE ID (PACK OF 10) 839-101870-002 716-021886-002 O-RING, BELL JAR PFE 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 810-017033-003 ASSY, PCB, SRAM 512K 810-102361-216 LAM RESEARCH 810-102361-216 CHAMBER MUX BOARD 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136