Parts For Sale LAM 853-001622-001 LAM 853-001622-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-001622-001 Manufacturer LAM Part Number 853-001622-001 Description ASSY SERIAL I / O HARNESS Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 715-331211-001 Liner Chamber Recoat Aluminum Oxide 713-028487-001 Vespel Confinement Ring 4 week lead 734-009250-001 O-RING, 5.0 I.D., QUARTZ WINDO 716-331088-001 Quartz Top Edge Ring, 8" ESC 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 810-495659-307 ASSY,PCB,PWR SUPPLY,ESC,BICEP 11 716-031535-002 RING, CLMP, BOT, CER ESC 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136