Parts For Sale LAM 853-001154-002 LAM 853-001154-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-001154-002 Manufacturer LAM Part Number 853-001154-002 Description EXIT ARM ASSY 4″ LAM 490 715-007100-002 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 NL Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 715-008067-001 Gate, Hard Anodized LAM P/N 715-008067-001 839-270652-001 LAM RESEARCH 839-270652-001 746-007779-001 BEARING-SPHERICAL.SELFALGN 571-045788-002 LAM RESEARCH 571-045788-002 CDSO IGS GAS BOX 150 PSIG 716-021856-001 CHEMRAZ, GASKET 716-004655-001 Ring Quartz Upper 839-101870-002 853-089988-115 LAM CABLE ASSY P/N 853-089988-115 , 684-121203-002, 684 ... 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 719-159808-801 LAM RESEARCH 719-159808-801 RING 839-011906-912 Electrode Silicon Polish