Parts For Sale LAM 853-000577R001 LAM 853-000577R001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-000577R001 Manufacturer LAM Part Number 853-000577R001 Description RFRB ASSY PHASE & MAG DETECTO Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 716-026652-902 Ring Edge BOT 200-300mm 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 716-026652-002 RING.EDGE.BOT.200-300mm 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 716-330121-014 Upper Ceramic Shaped Window 716-330504-081 Ring ,focus ,8' ,flatted GDR ESC ,ceramic 796-000719-001 GASKET, VCR, UNPLATED NICKLE 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 810-004115-002 PCB, CARD, MEMORY 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136