Parts For Sale LAM 852-11060-002 LAM 852-11060-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 852-11060-002 Manufacturer LAM Part Number 852-11060-002 Description ASSY HOUSING UPPER REAC CHAM Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 853-031498-001 ASSY HEATER CARTRIDGE 100 WATTS (LOWER C 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 715-011622-101 LIFTER WAFER, 4-PIN, FLEXIBLE 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 796-801289-001 MKS 93-6127 HIGH VACUUM VALVE 713-540184-004 .060 UPPER PEAK RING MODI 716-021884-001 GASKET DUCT AIR COOLED ISO 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 955-090225-001 Pad silicone rubber 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136