Parts For Sale LAM 851600109DSC513 LAM 851600109DSC513 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 851600109DSC513 Manufacturer LAM Part Number 851600109DSC513 Description Formed O-Ring for LAM 9600 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 720-092758-010 Screw 715-009779-002 Electrode Cap 490 Lower 723-001205-006 SPACER RND .14 X .25 X .38 718-092326-081 ELCTD,CAP,8" ESC,NOTCHED 715-330984-001 GASINJECTIONRING(R) Application: ALLIANCE9400PTX 839-330743-002 LAM BSR Bellows 716-460916-001 RING CHAMBER 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136