Parts For Sale LAM 839-800327-509 LAM 839-800327-509 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 839-800327-509 Manufacturer LAM Part Number 839-800327-509 Description E-Chuck Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 CN Unknown – JP Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-140069-002 Clamp Attachment Plate,ESC,150mm 853-002900-001 ASSY RF CABLE 853-015130-002 MINI-MATCH,,LAM 9600 720-092758-010 Screw 718-098592-001 LOCKING RING DPS METAL CHAMBER 723-001205-006 SPACER RND .14 X .25 X .38 715-370861-026 Orfice Cylinder 55 Holes Dia. 0.052" 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 715-330406-003 Retaining Clamp