Parts For Sale LAM 833-802213-003 LAM 833-802213-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 833-802213-003 Manufacturer LAM Part Number 833-802213-003 Description ASSY, CA, LEAK DET/NODE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 716-008645-005 Cover Ring Quartz HP 713-057586-001 PLUG,RTD,THRM CTRL PL 716-016831-007 Ring WAP Qtz Geniric 200mm 726-009029-001 CLEAT, SYNCHRO CLAMP 853-370186-001 CABLE OVERTEMP 713-028553-103 RING, CONFINEMENT, VESPEL 839-011906-902 SI CATHODE 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 718-043893-801 ELECTRODE, ESC 9400 724-077075-002 VACUUM ROBOT PICK