Parts For Sale LAM 811-05564R LAM 811-05564R Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 811-05564R Manufacturer LAM Part Number 811-05564R Description OUTER SHIELD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 715-330164-008 PLATE, ADJUSTMENT B.A.C 853-015762-001 SWITCH,(APM ARM)CONVUM CV-05HSCK SINGLE STAGE VACUUM PUMP 718-098591-001 PENDULUM PLATE OPM: VAT P/N OPM: 200500 853-015130-002 MINI-MATCH,,LAM 9600 716-331088-001 Quartz Top Edge Ring, 8" ESC 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-003473-802 Nozzle, Gas Injector KIYO 716-443234-002 Etch Kit Components in Process Kit ComponentsRING, FOCUS ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136