Parts For Sale LAM 810-56254R LAM 810-56254R Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 810-56254R Manufacturer LAM Part Number 810-56254R Description UPPER SHILED, (LTS-300A) Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 4.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 684-019144-304 CA LUXTN ST W/PL BDY/V-P 720-093815-006 Screw 6-32x0.38 Ceramic 853-015130-002 MINI-MATCH,,LAM 9600 715-140153-008 RING, COUPLING, ESC 8", JDA 810-015987-101 BOARD R PCB 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-443234-002 Etch Kit Components in Process Kit ComponentsRING, FOCUS ... 715-011531-015 ELECTRODE ALUM. ANODIZED 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136