Parts For Sale LAM 810-52060R LAM 810-52060R Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 810-52060R Manufacturer LAM Part Number 810-52060R Description RING, UPPER SHIELD Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 6.0 US Other LAM Parts 716-028668-268 SHADOW CLAMP, JEIDA, TOP ASSY 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 715-013639-007 Al Ground Ring 518-025348-001 TOOL TEMPERATURE CALIBRATION SOURCE 720-093815-006 Screw 6-32x0.38 Ceramic 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 716-011923-001 PLATE W/C ATTACHMENT DOUBLE PACKAGE 724-077075-002 VACUUM ROBOT PICK 715-012101-006 WAFER HOLDER 715-130092-006 XLL EXIT ARM 3 DIFFERENT TYP ... 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136