Parts For Sale LAM 810-52060R LAM 810-52060R Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 810-52060R Manufacturer LAM Part Number 810-52060R Description RING, UPPER SHIELD Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 6.0 US Other LAM Parts 715-018991-208 ELECTRODE, ALUMINUM ANODIZE 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 853-032776-001 ASSEMBLY PADDLE LIFTER 716-800842-008 NSR,FOC R,SHLD 200MM 716-016394-001 Etch Kit Components in Process Kit ComponentsRING, HP CO ... 716-011830-008 RING, FOCUS (ALUMINA) 8" WAFER CLAMP 715-801021-838 LINER. 715-801021-838,POLY LINER 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 810-017021-001 LAM 810-017021-001 Assembly PCB Lifter Filter, 422596