Parts For Sale LAM 810-52060R LAM 810-52060R Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 810-52060R Manufacturer LAM Part Number 810-52060R Description RING, UPPER SHIELD Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 6.0 US Other LAM Parts 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 839-440462-308 ASSY,ELCTD,ESC,200mm,SEMI 810-046015-010 LAM 810-046015-010 VIOP PHASE III PCB BOARD 715-021970-008 HOLDER WAFER 8" 713-011585-001 COVER, CLAMP BOLT ('A DIM. = .1) 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-011533-001 Window Quartz Gap Insulator 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136