Parts For Sale LAM 810-52060R LAM 810-52060R Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 810-52060R Manufacturer LAM Part Number 810-52060R Description RING, UPPER SHIELD Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 6.0 US Other LAM Parts 716-007136-011 Ring Quartz Upper HPT 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 720-093815-006 Screw 6-32x0.38 Ceramic 853-031703-001 Other P/N: 853-031685-003 716-800842-008 NSR,FOC R,SHLD 200MM 839-440462-308 ASSY,ELCTD,ESC,200mm,SEMI 810-017075-003 PCB,ORBITAL WELD,GAS PNL INT 2 REV2 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 2301911 Drytek 384t ESC plasma arrester weldment.