Parts For Sale LAM 810-52060R LAM 810-52060R Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 810-52060R Manufacturer LAM Part Number 810-52060R Description RING, UPPER SHIELD Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 6.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 720-009410-012 SCREW, SOCKET HEAD 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 715-330180-002 Lam Research 715-330180-002, ELCTD, BOT, FXD GAP ESC, LO ... 716-330131-001 716-011624-007 Ring Ceramic 853-031764-004 7890 LAM RESEARCH LOWER ELECTRODE, ESC, FIXED GAP (PARTS ... 716-800842-008 NSR,FOC R,SHLD 200MM 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-140236-003 Consignment Ring 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136