Parts For Sale LAM 810-52060R LAM 810-52060R Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 810-52060R Manufacturer LAM Part Number 810-52060R Description RING, UPPER SHIELD Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 6.0 US Other LAM Parts 853-090260-004 HOUSING, ASSY GAP ADJ NO ELECT. 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 839-024372-100 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 765-007787-001 SPROCKET DRIVE 2.873PD.500B 839-460152-006 LAM RESEARCH 6" HEATER 839-460152-006 734-007524-294 O-Ring Chemraz SSE38 21.17 ID x .142C/S 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-140139-211 Ring hot edge, hiwall, ESC8" 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136