Parts For Sale LAM 716-066539-004 LAM 716-066539-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 716-066539-004 Manufacturer LAM Part Number 716-066539-004 Description 716-066539-004 RING PEZ UPR BEVEL Y2O3 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 839-270652-001 LAM RESEARCH 839-270652-001 571-045788-002 LAM RESEARCH 571-045788-002 CDSO IGS GAS BOX 150 PSIG 853-012500-001 Lam 4420 Shuttle Assembly 853-012550-001 715-011531-016 ELECTRODE, ALUMINUM, ANODIZED 734-061280-278 O-RING (PACK OF 10) 839-101870-002 853-089988-115 LAM CABLE ASSY P/N 853-089988-115 , 684-121203-002, 684 ... 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 716-021886-002 O-RING, BELL JAR PFE 719-159808-801 LAM RESEARCH 719-159808-801 RING 839-011906-912 Electrode Silicon Polish 716-011603-001 PLATE, SEAL