Parts For Sale LAM 715-004166-001 LAM 715-004166-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 715-004166-001 Manufacturer LAM Part Number 715-004166-001 Description 490, Screw Chamber Bottom Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other LAM Parts 716-030135-001 Focus ring, 8" ESC 853-017423-005 CABLE ASSY COAX RFMATCH UPR 8FT 856-008059-002 SPR KIT REBUILT GAP ASSY 713-028487-001 Vespel Confinement Ring 4 week lead 839-101870-002 716-331142-001 Ring, edge, top, wide PCB 000-061 REV M 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 853-015130-002-M-3609 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-012350-002 LAM Research 853-012350-002 Etcher Outer Gate Assembly L ... 853-015130R204-E-ELM