Parts For Sale LAM 684-097326-015 LAM 684-097326-015 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 684-097326-015 Manufacturer LAM Part Number 684-097326-015 Description CA, TMP,FAN,15M Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 5.0 US Other LAM Parts 716-030135-001 Focus ring, 8" ESC 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 853-034464-001 ASSY MFC VAPOR DELIVERY H2O 500 SCCM , NO. 714-032782-00 ... 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 810-015932-002 Lam Research OnTrak 810-015932-002 - Dip Autotune Low Fr ... 724-077075-002 VACUUM ROBOT PICK 2301911 Drytek 384t ESC plasma arrester weldment. 716-331051-002 Uniformity Ring 716-013731-001 PAD, APM COLLAR 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136