Parts For Sale LAM 68-0084 LAM 68-0084 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 68-0084 Manufacturer LAM Part Number 68-0084 Description GB4-P ROBOT INTERFACE Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Refurbished 6.0 US Other LAM Parts 716-443179-102 R Edge Base Quartz 734-007335-001 O-RING ARM HOUSING SHAFT SEAL,VITON 734-007335-001 A4R1 ... 716-330504-064 ESC Focus Ring (Modified--Regrind) 6" 839-101870-002 734-093789-001 Seal O-Ring Gate Chamber 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 853-015130R204-C-ELM 719-159808-801 LAM RESEARCH 719-159808-801 RING 716-443234-002 Etch Kit Components in Process Kit ComponentsRING, FOCUS ... 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-015130R204-E-ELM 739-007783-001 Seal Quad Q4454