Parts For Sale LAM 678-098188-001 LAM 678-098188-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 678-098188-001 Manufacturer LAM Part Number 678-098188-001 Description HTR,MOD,VLV,ISO,ANGLE,4" Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 2.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 739-000985-001 Ball Seal 723-001205-006 SPACER RND .14 X .25 X .38 718-092326-081 ELCTD,CAP,8" ESC,NOTCHED 715-066095-202 ELCTD,RETURN,LOWER 839-101870-002 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE 716-069688-005 Inner/Outer 716-330890-001 CONTAMINANT RING OR BASE RING CERAMIC 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136