Parts For Sale LAM 666-390164-004 LAM 666-390164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 666-390164-004 Manufacturer LAM Part Number 666-390164-004 Description CA,CHMBR TC,ENCAP-8 FEMALE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 716-007136-011 Ring Quartz Upper HPT 713-057586-001 PLUG,RTD,THRM CTRL PL 715-330773-001 COVER TOP LWR CHMBR HOUSING 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 714-072728-117 Gasket 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 715-011531-011 ELECTRODE, ALUMINUM, ANODIZED 715-028626-101 Baffle 716-021886-002 O-RING, BELL JAR PFE 724-077075-002 VACUUM ROBOT PICK 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ...