Parts For Sale LAM 666-390164-004 LAM 666-390164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 666-390164-004 Manufacturer LAM Part Number 666-390164-004 Description CA,CHMBR TC,ENCAP-8 FEMALE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 571-045788-002 LAM RESEARCH 571-045788-002 CDSO IGS GAS BOX 150 PSIG 716-801568-002 Window Quartz 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 PCB 000-061 REV M 734-090633-001 720-443208-010 6-32 x 5/8" Slotted Flat Head Screw 716-160255-002 Chamber Plasma Quartz 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 715-011622-001 LIFTERWAFER4PIN Application: R4728