Parts For Sale LAM 666-390164-004 LAM 666-390164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 666-390164-004 Manufacturer LAM Part Number 666-390164-004 Description CA,CHMBR TC,ENCAP-8 FEMALE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 839-031766-001 BELLOWS LIFTER 853-370186-001 CABLE OVERTEMP 715-330773-001 COVER TOP LWR CHMBR HOUSING 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 89190-R1 GATE PLATE, VAT VAL 715-330825-006 CHAMBERLINER Application: ALLIANCE9400PTX 724-077075-002 VACUUM ROBOT PICK 853-370463-001 716-030136-001 FOCUSRING Application: R-4428