Parts For Sale LAM 666-390164-004 LAM 666-390164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 666-390164-004 Manufacturer LAM Part Number 666-390164-004 Description CA,CHMBR TC,ENCAP-8 FEMALE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 839-011906-001 ELECTRODE, SILICON, 6" 713-057586-001 PLUG,RTD,THRM CTRL PL 715-330825-007 ALUMINUM CHAMBER LINER 853-370186-001 CABLE OVERTEMP 718-094756-081 ELCTD,CAP,GD RING,ESC,8IN NCH 515-012169-001 TOOL, WAFER CENTERING 716-140163-261 Ring Hot Edge 15 DEG ESC STD 6" 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 724-077075-002 VACUUM ROBOT PICK 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-031556-037 Assy heater cartridge 75w (upper Ch2)
