Parts For Sale LAM 600866 LAM 600866 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 600866 Manufacturer LAM Part Number 600866 Description CLAMP RING ASSY CHMP ETCH Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-330915-003 SLV INSULATORESC-LOW CAP 713-057586-001 PLUG,RTD,THRM CTRL PL 723-001205-006 SPACER RND .14 X .25 X .38 715-330984-001 GASINJECTIONRING(R) Application: ALLIANCE9400PTX 839-101870-002 716-443086-401 Etch Kit Components in Process Kit ComponentsRING, HOT E ... 715-011985-106 CAP, LOWER ELECTRODE, 6 734-092559-016 O-RING, FLUOROSi ID.614 CSD.070 (PACK of 10) 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 756-007809-010 Screw Schd Shldr 10-32 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136