Parts For Sale LAM 600147 LAM 600147 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 600147 Manufacturer LAM Part Number 600147 Description HSG PLASMA ARREST Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 720-009530-016 Slotted Flat Head, KEL-F 1/4-20 x 1" 720-092759-016 Vespel 1/4-20 x 1" Slotted FH Screw 723-001205-006 SPACER RND .14 X .25 X .38 716-016394-013 CONFINEMENT RING 716-031453-001 RING, FILLER, LOWER CHAMBER 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 676-001677-001 MOTOR 24VDC 955-090225-001 Pad silicone rubber 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136