Parts For Sale LAM 520147000 LAM 520147000 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 520147000 Manufacturer LAM Part Number 520147000 Description SENSOR, PMICRO, 4P, OPM: OMRON P/N OPM: EE-SX672A Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 FR Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 713-057586-001 PLUG,RTD,THRM CTRL PL 713-072792-003 Etch FLEX Talon Ect. LAM 2300 Talon Gaskets 300mm 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 716-012640-011 Window Gas Inj. Face Seal Qtz NSG 720-009531-010 6-32 x 5/8 Slotted Flat Head, KEL-F 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-160255-002 Chamber Plasma Quartz 853-190260-001 CABLE ASSEMBLY; ASSY,CA,STPR MTR, ENTRANCE LDLK; 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136