Parts For Sale LAM 516176 LAM 516176 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 516176 Manufacturer LAM Part Number 516176 Description PLATE, SHIM, CURTAIN, N2 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 715-006310-001 SPACER 4-PIN LIFTER 716-011624-007 Ring Ceramic 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 22-132450-00 O-RING 724-077075-002 VACUUM ROBOT PICK 839-470315-001 Cap Gas 739-009418-001 739-009418-001 SEAL LID ROTARY 131052003 SHIM, MYLAR, 0.010 716-011563-165 6" DOMED W/C (1.5MM COV, W/PIN) 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136