Parts For Sale LAM 516176 LAM 516176 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 516176 Manufacturer LAM Part Number 516176 Description PLATE, SHIM, CURTAIN, N2 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-140163-261 Ring Hot Edge 15 DEG ESC STD 6" 02-321648-00 ASSY, HDISIOC2, VECTOR 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 839-800328-300 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-160255-002 Chamber Plasma Quartz 790-006301-001 Lifter Chamber Back-up 716-140139-211 Ring hot edge, hiwall, ESC8" 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136