Parts For Sale LAM 516176 LAM 516176 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 516176 Manufacturer LAM Part Number 516176 Description PLATE, SHIM, CURTAIN, N2 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 713-057586-001 PLUG,RTD,THRM CTRL PL 26-0200-371 BRUSH TRANSFER PM KIT 716-540198-001 Etch Kit Components in Process Kit ComponentsWINDOW, F S ... 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 715-003851-002 839-012255-001 Bellows Gate Inner 715-330092-002 COVER,NUT,BOT GAS FD W/O #715-330092-002 A4T2 TCP-9400 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136