Parts For Sale LAM 514-220001-002 LAM 514-220001-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 514-220001-002 Manufacturer LAM Part Number 514-220001-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 – Other LAM Parts 716-028123-003 RING, FILLER, CERAMIC, HI-C DOUBLE PACKAGE 716-030135-001 Focus ring, 8" ESC 853-330722-001 ASSY, ROD, CLPG, BAC, JD 810-015987-101 BOARD R PCB 839-101870-002 12-8882-068-002 775-091420-001 RESIN CARTRIDGE 13-8800-048-01 853-226429-001 853-002751-002-M 797-900918-003 713-011203-001 COVER 90DEG ENTRANCE LOADLOCK