Parts For Sale LAM 514-220001-002 LAM 514-220001-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 514-220001-002 Manufacturer LAM Part Number 514-220001-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 – Other LAM Parts 716-011624-001 Ring insulator-lower electro 810-800081-015 REV D 734-007357-001 O-RING VITON 75 BK 253,60X3,53 AS 274 810-800256-004 REV F 853-190023-001 REV A 810-330490-001 FILTER B/D 810-000839-003 REV B 716-331157-014 Top disk quartz 810-800256-004 REV G 734-092041-001 O-Ring Flouro Silicon Spacer Quartz 839-011906-912 Electrode Silicon Polish 810-017016-001 REV E