Parts For Sale LAM 2101113 LAM 2101113 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 2101113 Manufacturer LAM Part Number 2101113 Description PED OPTO COUPLER MTG PLATE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 716-021883-001 Gasket 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 772-470656-001 RGLTR,3-PORT & GAUGE,10Ra 723-001205-006 SPACER RND .14 X .25 X .38 857-020295-104 NEW LAM RESEARCH 857-020295-104 EZ WAFER PLUNGER CLAMP 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 718-043893-801 ELECTRODE, ESC 9400 716-330504-081 Ring ,focus ,8' ,flatted GDR ESC ,ceramic 724-077075-002 VACUUM ROBOT PICK 739-007783-001 Seal Quad Q4454