Parts For Sale LAM 2101113 LAM 2101113 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 2101113 Manufacturer LAM Part Number 2101113 Description PED OPTO COUPLER MTG PLATE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 660-242291-001 ASTRON i, AX7670 MKS PN. AX7670-83 LAM PN. 660-242291-00 ... 716-030135-001 Focus ring, 8" ESC 716-140118-001 RING,FOC ESC 8" DOUBLE PACKAGE 713-057586-001 PLUG,RTD,THRM CTRL PL 716-443086-401-A Etch Kit Components in Process Kit ComponentsRing, HOT E ... 715-330135-001 BSR GAS INJECTION RING INSTALLATION POSSIBLE ON: LAM TCP ... 853-370186-001 CABLE OVERTEMP 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 724-077075-002 VACUUM ROBOT PICK 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 713-018426-369 Insert, Vespel Ring