Parts For Sale LAM 13-8882-063 LAM 13-8882-063 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 13-8882-063 Manufacturer LAM Part Number 13-8882-063 Description FTG, BACKSIDE WASH Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 716-331088-001 Quartz Top Edge Ring, 8" ESC 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 720-096234-006 SCREW, FLAT HEAD 715-330394-001 SLIT 853-012200-002 Inner Gate Assembly (Fully with order) includes: air ... 715-011531-011 ELECTRODE, ALUMINUM, ANODIZED 724-077075-002 VACUUM ROBOT PICK 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 810-017086-107 Lam Research ESC POWER SUPPLY BOARD DC BIAS, 810-017086- ...