Parts For Sale KLA / TENCOR 6220/6400 KLA / TENCOR 6220/6400 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details KLA / TENCOR 6220/6400 Manufacturer KLA / TENCOR Part Number 6220/6400 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 – Other KLA / TENCOR Parts 113115 MOTOR, DC 24V 60 5:1 WBALL BRG 0073548-000 PCB Assy, Analog DF, SP1 Config. Rev: AA 3200-1226-03 REV. A 564-480908-000 PISCO 5300 VACUUM FILTER; KLA-TENCOR 564-480908-000 PISC ... FLX-2320 RS55 TCA 740-212516-000 Description: Rev.Level ACO Y Motor Additional Make and M ... 710-404582-00 PZT CONTROLLER BOARD; P/N: 073-404581-00, ASSY Alpha Step 250 Profilometer HRP220/320 0067824-000 STAGE Y AXIS CABLE AIT 1