Parts For Sale KLA / TENCOR 52-0366 KLA / TENCOR 52-0366 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details KLA / TENCOR 52-0366 Manufacturer KLA / TENCOR Part Number 52-0366 Description ENCODER ASSYZ-ENERGENCY Status Available Approx. Qty 20 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 20.0 US Other KLA / TENCOR Parts SFS7600 54-0317 MEASUREMENT CONTROL BOARD (WITH EXCHANGE) 710-713250-01 KLA Tencor Illumination Control 710-713250-01 373583 ANALOG AIT2 AIT2 FLX-2320 0085675-000 Single Paddle End-Effector. 2114B-30SLT LASER POWER SUPPLY METRO 0023965-004 Assembly, Chuck 300mm, EHII. Used in KLA-Tencor SP1 Edge ... 0029191-000 PRE -300BU-I-CE-S2 ALIGNER METRO 318809 KT- PCB ASSY. 318809 58-0056 KIT STEPPER RS75