Parts For Sale HITACHI ILC4-I HITACHI ILC4-I Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI ILC4-I Manufacturer HITACHI Part Number ILC4-I Description Hitachi Control Board ILC4-I Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other HITACHI Parts IS3000 3-837467-01 O-RING (REPLACED BY 4-820960-01) 3-841707-01 ROD SUPPORT, ER SHAFT 3-852688-01 Hitachi 300mm Quartz Sleeve 3-852688-01 SP14Q002-A1 5.7"320*240 FSTN-LCD 567-0036 567-0036 3-834580-01 WAFER SUPPORT 3-836509-02 PHOTO SENSOR 2-811904-B QUARTZ BELL JAR ETCH 569-3090 COVER RING 4H ABN111 PUSH BUTTON SWITCH ABN111 3-850223-01 INSULATOR RING