Parts For Sale HITACHI CS-A113-4E2-83-PSL HITACHI CS-A113-4E2-83-PSL Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI CS-A113-4E2-83-PSL Manufacturer HITACHI Part Number CS-A113-4E2-83-PSL Description SOLENOID DRIVE FOR DRIVE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other HITACHI Parts IS3000 3-837467-01 O-RING (REPLACED BY 4-820960-01) UT-300 3-852688-01 Hitachi 300mm Quartz Sleeve 3-852688-01 2-819062-A FLEXIBLE TUBE 3-842099-A PCB, RYB308X-2 3-835067-02 ELECTROIC THERMO (5L-A1) 2-814358 BELLOW FLANGE (GV1) 2-820084-1-1486 WAFER HOLDER 3-850223-01 INSULATOR RING 569-5504 Hitachi 569-5504 SEM Stage Control Panel S-9300 S3-83773-01 PLATE