Parts For Sale HITACHI 566-2405 HITACHI 566-2405 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 566-2405 Manufacturer HITACHI Part Number 566-2405 Description PLATE - APETURE .03 X 4 MM Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other HITACHI Parts 3-834401-01 INSULATION RING, OUTER HL8000M 3-852688-01 Hitachi 300mm Quartz Sleeve 3-852688-01 S3-90626-01 POWER SUPPLY 690-0219 超高圧UVランプ S-5000 SEM L456185 O-RING, AV-3 1-815864-A BLOCK CHAMBER 2-820987-1 PCB, PTPA-01, ETCH UMSD-30 BOARD, ROBOT CONTROL DRIVER 3-823139-A WAFER,PUSHER,ETCH