Parts For Sale HITACHI 566-1939 HITACHI 566-1939 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 566-1939 Manufacturer HITACHI Part Number 566-1939 Description ARM,CERAMIC,TRNFR,S6600 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other HITACHI Parts IS3000 2-819065-001 SUSCEPTOR ( 8" ) 3-837467-01 O-RING (REPLACED BY 4-820960-01) ILE-02 Hitachi ILE-02 Relay PCB 533-1001 END APERTURE 560-5510 560-5509 Hitachi S-9300 SEM High Voltage Control Unit MHVC 560-55 ... 3-834580-01 WAFER SUPPORT 3-836509-02 PHOTO SENSOR 1-A01052-*A ELECTRIC DISCHARGE BLOCK S-88XX HV Controller with core exchange ABN111 PUSH BUTTON SWITCH ABN111 UMSD-30 BOARD, ROBOT CONTROL DRIVER