Parts For Sale HITACHI 2-826156-A HITACHI 2-826156-A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 2-826156-A Manufacturer HITACHI Part Number 2-826156-A Description KIT, LOADLOCK, STAGE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 2.0 US Other HITACHI Parts 549-5501 Hitachi 549-5501 Circuit Board SIO/DIST Hitachi S-9380 3-823123-11 ORING,P50,PERFLOUR L-VALVE 1-A01052-*A ELECTRIC DISCHARGE BLOCK SFC480CMO-4V4C2 MFC HBR 300 SCCM 1-809700 ELECTRODE HEAD ( 8" ) 2-819158-008 UNIFORMITY RING 4CM 560-5510 560-5509 Hitachi S-9300 SEM High Voltage Control Unit MHVC 560-55 ... 2-821454-D Hitachi Electrode Head Vendor 2-821454-D M6642 REV. A TE-C90060A 3-842612-01 PANEL MOUNT INSTRUMENTATION PIPING 566-5510 PCB, CIR ASSY HV/LENS