Parts For Sale GASONICS A94-062-01 GASONICS A94-062-01 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details GASONICS A94-062-01 Manufacturer GASONICS Part Number A94-062-01 Description ARM THETA ASSY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other GASONICS Parts 78-2562 O ring Chemraz A06-300-01 WINDOW, QUARTZ, 9.5 INCH 06-0091-01 PLASMA CHAMBER A39-005-01 Lamp 24V 94-1179 KIT SENSOR 78-0159 O ring Kalrez 22-0138 Vac Valve A90-039-01 PCB, SENSOR, CURRENT, LAMP L3510 90-27004 HEAT SOLUTION