Parts For Sale GASONICS A01-102-01 GASONICS A01-102-01 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details GASONICS A01-102-01 Manufacturer GASONICS Part Number A01-102-01 Description Vacuum Chuck Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other GASONICS Parts A01-163-01 ROD SUPPORT BRACKET 06-0091-01 PLASMA CHAMBER 78-0159 O ring Kalrez 16783-01 Chamber, Quartz, Plasma A90-005-02 PBC CONTROLLER BOARD INSTALLATION POSSIBLE ON: AURA 1000 ... A90-039-01 PCB, SENSOR, CURRENT, LAMP 06-0123 LOT of 2: GASONICS 06-0123, CQuartz Coupling, 3-Way, Ext ... 90-2609 Gasonics 90-2609 Display Decoder PCB Rev. A A95-070-01 AURA A1000, TRANSFORMER 95-0292 POWER SUPPLY 90-1002-01 VALVE CONT. ASSY